During de oxygen plasma cleaning of hydocarbon-containing light lubric
ants deposited on aluminum the energy fluxes towards the substrates ha
ve been determined by temperature measurements. The contributions to t
he total energy influx are due to exothermic combustion reactions of t
he petroleum-like lubricants by the plasma generated oxygen atoms and
due to kinetic ion energy transfer. By variation of the discharge mode
and substrate voltage the effect of the two contributions could be se
parated. In the anomalous glow discharge mode, where the ion energy in
flux was of importance, the treated substrates were at cathode potenti
al (-500 to -1200 V) and vice versa, in the hollow cathode discharge m
ode the substrates were at floating potential where only the chemical
component contributes to substrate heating. A comparison of the measur
ements with calculations based on simple model assumptions is given. (
C) 1997 Elsevier Science Ltd. All rights reserved.