VAPOR-PHASE EPITAXY OF INN WITH HALIDE TRANSPORT ON EARTH AND UNDER MICROGRAVITY

Authors
KIMURA T NISHIMURA T MUROTANI T ONO H
Citation
T. Kimura et al., VAPOR-PHASE EPITAXY OF INN WITH HALIDE TRANSPORT ON EARTH AND UNDER MICROGRAVITY, Journal of applied physics, 75(1), 1994, pp. 624-626
Citations number
5
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
75
Issue
1
Year of publication
1994
Pages
624 - 626
Database
ISI
SICI code
0021-8979(1994)75:1<624:VEOIWH>2.0.ZU;2-4
Abstract
Vapor phase epitaxial growth of InP with halide as the transport agent has been carried out in closed ampoules on earth and under microgravi ty. On earth, a large variation in the thickness of the InP grown laye r has been observed with the change of the disposition of ampoules aga inst a gravity field. A microgravity experiment has been conducted on board the Technologische Experimente Unter Schwerelosigkeit rocket for a period of approximately 6 min. The growth of the S-doped InP layer was confirmed.