DIAPHRAGM-TYPE SPUTTERED PLATINUM THIN-FILM STRAIN-GAUGE PRESSURE TRANSDUCER

A diaphragm-type pressure transducer with a sputtered platinum film st rain gauge (sensing film) has been designed and fabricated. The variou s steps followed to prepare thin film strain gauges on the diaphragm a re described. M-bond 450 adhesive (Measurements Group, USA) has been e mployed as the insulating layer. A detailed procedure to cure this lay er is given. A direct current sputtering method is employed to prepare the platinum films. This paper also includes details of the strain ga uge pattern and its location on the diaphragm. A description of the ou tput characteristics and overall behaviour of the platinum thin film p ressure transducer is reported.