We report the preparation of T(c)-optimized Bi2Sr2Ca1Cu2O8+delta thin
films on SrTiO3 substrates using a planar dc-sputtering method. The ox
ygen content of these films is adjusted in situ by controlling the oxy
gen flow during sputtering. The oxygen content can be varied continuou
sly from the overdoped state (T(c)=72 K) to the condition with optimum
oxygen content (T(c)=88 K), and further, to the underdoped state (T(c
)=76 K). The oxygen content is determined by x-ray measurements of the
c-axis lattice parameter.