The visible luminescence of porous Si is known to contain at least two
spectrally distinct emission bands with widely different response tim
es. The orange-red luminescence component (1.5-1.9 eV) decays in times
being of the order of 10 mu s at room temperature. The blue-green ban
d (2.3-2.6 eV) is very much faster with response time in the 10-ns ran
ge. It is shown that with increasing degree of oxidation the fraction
of the fast luminescence intensity rises from similar to 1% of the tot
al in the as-prepared porous Si to become the dominant spectral compon
ent in strongly oxidized material. For the rapid-thermal-oxidized mate
rial excited with 337-nm radiation, the intensity of the fast luminesc
ence is comparable to that in the as-prepared state.