Ch. Mueller et al., EFFECT OF OXYGEN-PRESSURE ON THE ORIENTATION OF YBA2CU3O7-X SRTIO3 FILMS DEPOSITED ON (1(1)OVER-BAR-02) AL2O3 SUBSTRATES/, Thin solid films, 238(1), 1994, pp. 123-126
The oxygen pressure P(O2) during growth of strontium titanate (SrTiO3)
films on single crystals of (1102BAR) oriented sapphire (Al2O3) subst
rates significantly influenced the film orientations. The films were d
eposited using a pulsed laser (248 nm) deposition process in which the
SrTiO3 films were deposited at a P(O2) of either 40 or 200 mTorr, and
the YBa2Cu3O7-x (YBCO) films were always deposited at 200 mTorr of ox
ygen. We found that growth at 40 mTorr induced the (110) SrTiO3 orient
ation to predominate, while increasing the P(O2) to 200 mTorr favored
the (100) orientation. YBCO films deposited on these barrier layers we
re (013) and (001) oriented respectively; these were the orientations
that minimized lattice mismatch at the YBCO/SrTiO3 interface.