The physicochemical properties of hylamino-5-dicyanomethylene-5H-benzo
[a]phenoxazine and its vacuum-deposited thin films as well as its modi
fied thin films (phase and chemical compositions, film microstructure)
have been studied. Changes in the vapour phase content of the phenoxa
zone-5 derivative have been investigated as a function of the boat eva
porator temperature. The chemical structures of the transformation pro
ducts have been established. Thin films of ylamino-5-dicyanomethylene-
5H-benzo[a]-phenoxazine show good light-sensitive and masking properti
es and are suitable for submicron patterning under UV exposure at lamb
da = 266 nm.