INITIAL-STAGES OF DEVELOPMENT OF THE SURFACE-TOPOGRAPHY INDUCED BY ION-BOMBARDMENT

The development of surface topography is conducted on the basis of con sideration of the stochastic sputtering process. Elemental, inhomogene ous and multilayer structures are investigated. It is shown that in th e case of multilayer structures the microscopic roughness of the surfa ce depends significantly on the ratio of sputtering yields of contacti ng layers and on the interface properties. It is shown that ion beams can be employed for surface roughness control.