A. Dygo et al., RANDOM SPECTRUM FOR THE CHANNELING-BACKSCATTERING TECHNIQUE - A ROTATING AXIAL-DIP STUDY, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 84(1), 1994, pp. 23-30
The (100) axial channeling dip for a Si single crystal, obtained by av
eraging over azimuthal angles, is studied experimentally and by Monte
Carlo simulation for tilt angles theta up to 16-degrees using a 1.5 Me
V energy He-4+ ion beam. Both in the experiment and the simulation, th
e dip shape is found to be in a quantitative agreement with the rule o
f angular compensation; the influence of the (100) axis extends to the
ta almost-equal-to 6-degrees. Surprisingly strong fine structure in th
e yield, with a number of distinct secondary dips, is observed for the
ta > 6-degrees. It is shown that this structure is related to some hig
h-index crystallographic planes being nearly tangent to the azimuthal
scans at certain tilts. Good agreement between the experiment and simu
lation is obtained at all tilt angles investigated. Consequences for t
he random yield determination in channeling studies are discussed.