MASS-SEPARATED ION-BEAM DEPOSITION OF DIAMOND-LIKE THIN-FILMS

Authors
HUCK H JECH A HALAC EB NICOLAI J DEBENYACAR MAR RIGHINI R
Citation
H. Huck et al., MASS-SEPARATED ION-BEAM DEPOSITION OF DIAMOND-LIKE THIN-FILMS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 84(1), 1994, pp. 62-66
Citations number
21
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
84
Issue
1
Year of publication
1994
Pages
62 - 66
Database
ISI
SICI code
0168-583X(1994)84:1<62:MIDODT>2.0.ZU;2-2
Abstract
Deposition of diamond-like thin films has been achieved using mass-sep arated C+, CH3+ and CH4+ ion beams of energies between 1 and 40 keV. C haracterization using different methods shows that the structure and p hysical properties of the films obtained are closer to those of diamon d when 30-40 keV CH3+ or CH4+ ion beams are used. The hydrogen concent ration, measured with elastic recoil detection analysis, is lower than 1 at.% for all the 30 keV hydrocarbon beams used.