RECTANGULAR SQUEEZE-FILM GAS BEARING USING A PIEZOELECTRIC ACTUATOR -APPLICATION TO A LINEAR MOTION GUIDE

This paper describes the float characteristics of a rectangular squeez e-film gas bearing using a piezoelectric actuator as a vibration sourc e. In this bearing, a counterweight is attached to a slider through a piezoelectric actuator in order to make the slider vibrate and generat e squeeze-film pressure under the slider. The influences of various de sign parameters on the float characteristics of the proposed bearing a re investigated theoretically and experimentally. Further, a new slide r-guideway system for a linear motion guide is proposed and the float characteristics of the bearing are also investigated. It was consequen tly found that the squeeze-film bearing with 450 mm(2) area for a line ar motion guide can carry a counterweight of 3.92N with the amplitude of 0.5 mu m of the actuator.