APFIM STUDIES OF COMPOSITIONAL INHOMOGENEITY IN SPUTTERED CO-CR THIN-FILMS

Authors
HONO K MAEDA Y LI JL SAKURAI T
Citation
K. Hono et al., APFIM STUDIES OF COMPOSITIONAL INHOMOGENEITY IN SPUTTERED CO-CR THIN-FILMS, IEEE transactions on magnetics, 29(6), 1993, pp. 3745-3747
Citations number
11
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied
Journal title
IEEE transactions on magnetics → ACNP
ISSN journal
00189464
Volume
29
Issue
6
Year of publication
1993
Part
2
Pages
3745 - 3747
Database
ISI
SICI code
0018-9464(1993)29:6<3745:ASOCII>2.0.ZU;2-Z
Abstract
Atom probe analysis results of Co-22at%CR bulk alloy and its thin film s are presented. While no compositional inhomogeneity is detected from the bulk sample, a significant compositional fluctuation is present i n the thin film specimen which is sputter deposited on a heated substr ate. The concentration of the Cr enriched region is in the range of 30 - 40 at.%Cr, while that of the Cr depleted region is approximately 5 at.%Cr. Such compositional fluctuations are present within a grain. Th ese results are in agreement with NMR and TEM results.