PROPERTIES OF DIAMOND-LIKE CARBON-FILM AND ITS APPLICATION AS A PROTECTIVE LAYER IN THIN-FILM MAGNETIC RECORDING DISKS

Authors
KOKAKU Y MATSUMOTO H INABA H FUJIMAKI S KITOH M ABE K
Citation
Y. Kokaku et al., PROPERTIES OF DIAMOND-LIKE CARBON-FILM AND ITS APPLICATION AS A PROTECTIVE LAYER IN THIN-FILM MAGNETIC RECORDING DISKS, IEEE transactions on magnetics, 29(6), 1993, pp. 3942-3944
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied
Journal title
IEEE transactions on magnetics → ACNP
ISSN journal
00189464
Volume
29
Issue
6
Year of publication
1993
Part
2
Pages
3942 - 3944
Database
ISI
SICI code
0018-9464(1993)29:6<3942:PODCAI>2.0.ZU;2-F
Abstract
Wear rate of diamond-like carbon (DLC) protective layer deposited by a radio frequency plasma enhanced chemical vapor deposition method has been evaluated by continuous sliding tests using spherical sapphire pi ns. The influences of each property such as microstructure and microha rdness on wear durability of the film have been discussed. It has been found that the wear durability. of the DLC film is several times supe rior to that of conventional sputtered carbon film.