The high current density of the STM can result in substantial vibratio
nal heating via inelastic electron tunneling. Under certain conditions
, the vibrational distribution at a given current-density is approxima
tely Maxwell-Boltzmann, with a characteristic temperature that reflect
s a balance between excitation by the tunneling electrons and relaxati
on processes. A simple expression is given for the steady-state vibrat
ional temperature in the presence of tunneling current. Calculations i
ndicate that vibrational heating by inelastic tunneling plays an impor
tant role in the transfer of Xe atoms between sample and tip surfaces.
Directionality of Xe atom-transfer, and applications to other systems
are discussed.