The spectral resolution of HREELS is determined by both instrumental a
nd sample-related factors. Despite substantial progress in electron op
tic design, these factors ate still a limitation in assigning the vibr
ational modes of complex molecules and in determining linewidths. To t
he extent that all spectral features are broadened in the same way and
within signal to noise limitations, currently available spectral rest
oration methods may provide a reliable solution. In principle, the mea
sured elastic peak provides a template for deconvolution of these fact
ors from the observed lineshapes. We compare results of a direct decon
volution method, in which division in the Fourier domain is followed b
y a linearised maximum entropy filter, with iterative methods based on
maximum likelihood, maximum entropy and Bayesian principles involving
only multiplication (i.e. convolution) in the Fourier domain. These m
ethods are applicable both to spectra of modest resolution (intrinsic
linewidths << instrumental linewidth) and to high resolution spectra (
linewidths approximate to instrumental resolution) in which spectral l
ineshapes are measurably different. The asymmetry and tailing of the e
lastic peak, which are critical to restoration of low frequency featur
es, are determined by a number of processes such as multiple scatterin
g, the thermal population of vibrational states, and low energy contin
uum excitations (e-h pairs, phonons) of the substrate. These factors,
as well as practical considerations, are discussed in relation to meas
uring data for optimal spectral restoration.