WASTE GENERATION AND MINIMIZATION IN SEMICONDUCTOR INDUSTRY

Semiconductors are electrical devices that perform functions such as p rocessing and display, power handling, and conversion between light an d electrical energy. Semiconductor production processes involve over 1 00 proprietary solutions and 200 generic materials to achieve the fina l product. This industry generates significant quantities of spent sol vents and liquids containing metals. The economic and liability incent ives caused by increasing disposal costs and more stringent regulation s are resulting in efforts to minimize such wastes at the source. This paper provides information about: (1) The type and quantity of wastes produced by this industry, much of which are listed hazardous wastes; (2) the hazardous waste disposal problems facing this industry; and ( 3) waste minimization case studies.