ZRO2 AND YSZ THIN-FILMS SYNTHESIZED BY MI CROWAVE PLASMA CVD PROCESS

Zirconia and yttria-stabilized zirconia (YSZ) thin films mere successf ully synthesized on a variety of substrates by microwave plasma CVD pr ocess, Using beta-diketone chelates as volatile sources. The ZrO2 film s we got contain monoclinic and tetragonal phases. In YSZ films, when Y2O3 content was less than 7 mole percent, two-phases were observed, n amely cubic and monoclinic zirconia. When the content bigger than 7 mo le percent, the film only has a cubic phase. TEM observation and XRD a nalysis, the ZrO2 and YSZ films consist of nanoscale crystallites, whi ch size is about 10nm. XPS analysis revealed that the Zr3d(5/2) and Zr 3d(3/2) binding energies were lower than the standard values.