MICROSTRUCTURAL STUDY OF YBA2CU3O7-X THIN-FILMS ON SI WITH MGO AS A BUFFER LAYER

A microstructural study of YBCO thin films grown on Si with MgO as a b uffer layer by the rf magnetron sputtering method combined with the ho t-wall sputtering method has been carried out. The structure of the th in films were investigated by XRD and TEM. The highly c-oriented YBCO thin films on the polycrystalline MgO buffer layer were found. However , around the interface between YBCO and MgO the orientation of YBCO is a-oriented rather than c-oriented, and the interface between MgO and Si is an amorphous oxide layer, the polycrystalline MgO was found abov e the oxide layer. The relationship between the superconducting proper ty and the interface microstructure is also be discussed.