A NEW METHOD FOR DETECTING SUBTLE CHANGES IN SI-H BONDS OF A-SI-H

Citation
Gl. Kong et al., A NEW METHOD FOR DETECTING SUBTLE CHANGES IN SI-H BONDS OF A-SI-H, Journal of non-crystalline solids, 166, 1993, pp. 211-214
Citations number
8
Categorie Soggetti
Material Science, Ceramics
ISSN journal
00223093
Volume
166
Year of publication
1993
Part
1
Pages
211 - 214
Database
ISI
SICI code
0022-3093(1993)166:<211:ANMFDS>2.0.ZU;2-R
Abstract
A new method developed for detecting possible subtle changes in Si-H b onds of a-Si:H after light soaking is described in detail. The method promises a sensitivity orders of magnitude higher than that reached by the usual IR spectrometer. Some preliminary results on phosphorus dop ed a-Si:H are given.