EXPERIMENTAL-STUDY OF DISORDER AND DEFECTS IN UNDOPED A-SI-H AS A FUNCTION OF ANNEALING AND HYDROGEN EVOLUTION

Authors
ZELLAMA K VONBARDELEBEN JH QUILLET V BOUIZEM Y SLADEK P THEYE ML CABARROCAS PRI
Citation
K. Zellama et al., EXPERIMENTAL-STUDY OF DISORDER AND DEFECTS IN UNDOPED A-SI-H AS A FUNCTION OF ANNEALING AND HYDROGEN EVOLUTION, Journal of non-crystalline solids, 166, 1993, pp. 285-288
Citations number
7
Categorie Soggetti
Material Science, Ceramics
Journal title
Journal of non-crystalline solids → ACNP
ISSN journal
00223093
Volume
166
Year of publication
1993
Part
1
Pages
285 - 288
Database
ISI
SICI code
0022-3093(1993)166:<285:EODADI>2.0.ZU;2-C
Abstract
Information on the incorporation of hydrogen and its effects on the di sorder and the defects in undoped PECVD a-Si:H films deposited under d ifferent conditions is gained from systematic annealing studies up to 500-600 degrees C. The results reveal a better bonded hydrogen stabili ty in the samples deposited at high rate, related to their particular microstructure.