The constant photoconductivity measurement technique (CPM) is applied
to high quality hydrogenated amorphous germanium (a-Ge:H) samples at t
emperatures between 300 and 130K. Considering the temperature dependen
ce of the Urbach energy E(o) an upper limit of 30meV is found for the
contribution of the structural disorder to E(o) in a-Ge:H. From CPM me
asurements at temperatures below 170K the defect density can be succes
sfully determined. A comparison of CPM and PDS results reveals a stron
g influence of surface defects on the total defect density of high qua
lity a-Ge:H.