The light-induced defect density, the Urbach parameter and the Fermi l
evel shift depending on its initial position have been investigated. T
he a-Si:H films were deposited using a triode glow discharge technique
to control the epsilon(F) without any doping (epsilon(C) - epsilon(F)
= 0.44 - 0.92 eV), i.e. any possible light-induced defect-dopant inte
ractions were eliminated. The results obtained seem not to be in line
with models based on an extrinsic origin of the defects in a-Si:H.