Cross sections of a stressed Ge-Ge1-xSix superlattice, grown by the hy
dride method, were studied for the first time by the method of transmi
ssion electron microscopy. The nature of the distribution of defects w
hich relieved the elastic effects of the Ge substrate on the periodic
structure was determined. X-ray diffraction was used in a study of the
dependence of the elastic accommodation in the heterojunction layers
on their composition and thickness. The elastic stresses in the surfac
e layers of the superlattice had a significant influence on the electr
oreflection spectra of visible light: they shifted and split the spect
ral lines. The high quality of these superlattices made it possible to
observe (again for the first time) doublets in the Raman light-scatte
ring spectra.