MECHANISMS OF PYROLYSIS OF ORGANOMETALLIC DEPOSITION PRECURSORS

The gas-phase pyrolysis mechanisms of a number of potential transition -metal deposition precursors have been investigated using the techniqu es of: (i) infrared laser powered homogeneous pyrolysis coupled with p roduct identification by FTIR, NMR and GC-MS; (ii) stirred Flow Reacto r kinetic measurements; (iii) EPR spectroscopy of matrix-isolated free radicals. Preliminary results are presented for: (a) MeMn(CO)(5) and AcMn(CO)(5), both alone and in the presence of Me(3)SiH; (b) C5H5Mn(CO )(3) and MeC(5)H(4)Mn(CO)(3); (c) C4H6Fe(CO)(3); and (d) (C5H5)(2)Fe, all of which provide clear evidence that purely homogeneous pathways c an be very different from those of surface-catalysed decomposition.