CHEMOMECHANICAL POLISHING OF LITHIUM-NIOBATE USING ALKALINE SILICA SOL AND ALKALINE SILICA SOL MODIFIED WITH HYDROGENDIFLUORIDE ANION

Authors
BEVERIDGE M MCGHEE L MCMEEKIN SG ROBERTSON MI ROSS A WINFIELD JM
Citation
M. Beveridge et al., CHEMOMECHANICAL POLISHING OF LITHIUM-NIOBATE USING ALKALINE SILICA SOL AND ALKALINE SILICA SOL MODIFIED WITH HYDROGENDIFLUORIDE ANION, Journal of materials chemistry, 4(1), 1994, pp. 119-124
Citations number
39
Categorie Soggetti
Chemistry Physical","Material Science
Journal title
Journal of materials chemistry → ACNP
ISSN journal
09599428
Volume
4
Issue
1
Year of publication
1994
Pages
119 - 124
Database
ISI
SICI code
0959-9428(1994)4:1<119:CPOLUA>2.0.ZU;2-P
Abstract
Lithium niobate undergoes a slow reaction with anhydrous HF at room te mperature to give LiNbOF4 which is readily hydrolysed to give Nb2O5 as one product. This sequence of reactions is believed to be responsible for the superior performance of aqueous alkaline silica sol modified by the addition of [HF2](-) for the chemomechanical polishing ofLiNbO( 3) wafers, compared with silica sol alone.