PHYSICOCHEMICAL CHANGES IN A-C-H BY MEV HE ION IRRADIATION

The effect of He ion irradiation on the hydrogen content and structure of a-C:H films has been examined. Comparison of elastic recoil detect ion and Fourier transform infrared spectroscopy results have shown tha t significant hydrogen depletion occurs in conjunction with an equally significant change in the structure of the films. Examination of the films' hydrogen profiles also indicates that the diffusion length of m olecular hydrogen in these materials during bombardment may be between 160-320 nm.