T. Takashima et al., METALLIZING OF SILICON-CARBIDE CERAMICS W ITH TITANIUM VAPOR, Nippon Seramikkusu Kyokai gakujutsu ronbunshi, 105(1), 1997, pp. 68-72
Silicon-carbide ceramic was metallized with titanium by the vapor-diff
usion method, where pure titanium powder was used as a vapor source at
temperatures between 973 and 1323 K for up to 296.1 ks in a dynamic v
acuum atmosphere, The structure and composition of the metallized laye
rs were investigated by scanning electron microscopy, electron-probe m
icroanalysis, and X-ray diffraction analysis, At the initial stage of
the metallization, titanium vapor reacted preferentially with the so c
alled free carbon in the grain boundaries of SIC ceramics to form a ti
tanium carbide, and then a metallized layer was grown laterally, formi
ng the sublayer structures. This sub-layer structure was composed of f
ive sub-layers; TiC (top surface), Ti3Si3 containing TiC (outer layer)
, TiC containing Ti5Si3 (middle layer), Ti5Si3 (inner layer) and Ti3Si
C2 (bottom layer). Growth kinetics of each sub-layer and their total t
hicknesses obeyed the parabolic rate law, and the parabolic rate const
ants (kp) for the total layer varied between 10(-16) m(2) . s(-1) at 1
173 K and 10(-15) m(2) s(-1) at 1323 K. The activation energy (Q(kp))
obtained for the metallized layer was 153 kJ mol(-1).