STUDY OF FILM CRYSTALLIZATION KINETICS INITIAL-STAGE BY MONTE-CARLO SIMULATION

Monte Carlo Simulation has been used for studying the initial stage ch aracteristics of film crystallization during the layer-by-layer film g rowth by two-dimensional nucleation. It is shown that the non-monotono us changes of the growing film perimeter and mass correspond to the re flection intensity oscillation from the growth surface. The observed c hanges of the overgrowing part of the surface are in agreement with th e probability-statistical calculations. The vizualization of surface r elief changes during the growth process under different conditions has been provided.