R. Gottfriedgottfried et al., A MINIATURIZED MAGNETIC-FIELD SENSOR SYSTEM CONSISTING OF A PLANAR FLUXGATE SENSOR AND A CMOS READOUT CIRCUITRY, Sensors and actuators. A, Physical, 54(1-3), 1996, pp. 443-447
We report on a miniaturized magnetic-field sensor system consisting of
a fluxgate sensor fabricated in CMOS-compatible planar technology and
a CMOS-ASIC for sensor supply, readout and signal processing using th
e second-harmonic principle with a feedback loop for zero-field operat
ion. The system exhibits a sensitivity of 9.2 +/- 0.1 mV mu T-1 for a
magnetic held range of +/- 90 mu T and a temperature range of 0 to 70
degrees C. The 3 dB bandwith is 300 Hz and a noise value of 30 nT Hz(-
1/2) has been estimated. Using 5 V supply voltage, the power consumpti
on of the system is measured to be 160 mW.