CAPACITANCE STUDIES OF THE A-SI TFT INPUT STAGE

Citation
Ar. Long et al., CAPACITANCE STUDIES OF THE A-SI TFT INPUT STAGE, Journal of non-crystalline solids, 166, 1993, pp. 767-770
Citations number
4
Categorie Soggetti
Material Science, Ceramics
ISSN journal
00223093
Volume
166
Year of publication
1993
Part
2
Pages
767 - 770
Database
ISI
SICI code
0022-3093(1993)166:<767:CSOTAT>2.0.ZU;2-E
Abstract
Capacitance studies of large area structures which mimic the overlap r egion between source and gate at the input of an amorphous silicon thi n film transistor are used to investigate the nature and distribution of the localised states found within the gate insulator and at the int erface between insulator and active amorphous silicon layer.