HYDROGENATED AMORPHOUS-SILICON BASED LIGHT-ADDRESSABLE POTENTIOMETRICSENSOR (LAPS) FOR HYDROGEN DETECTION

Authors
PECORA A FORTUNATO G CARLUCCIO R SACCO S
Citation
A. Pecora et al., HYDROGENATED AMORPHOUS-SILICON BASED LIGHT-ADDRESSABLE POTENTIOMETRICSENSOR (LAPS) FOR HYDROGEN DETECTION, Journal of non-crystalline solids, 166, 1993, pp. 793-796
Citations number
7
Categorie Soggetti
Material Science, Ceramics
Journal title
Journal of non-crystalline solids → ACNP
ISSN journal
00223093
Volume
166
Year of publication
1993
Part
2
Pages
793 - 796
Database
ISI
SICI code
0022-3093(1993)166:<793:HABLP>2.0.ZU;2-Y
Abstract
Light-addressable potentiometric sensors (LAPS) based on metal/amorpho us silicon/insulator structures, with Pd gate electrodes, have been fa bricated and successfully operated as hydrogen sensors. The device res ponse show a very good reproducibility and high stability allowing the possibility to detect a very low Hz concentration.