PROPERTIES OF SPUTTERED A-SIOX-H ALLOYS WITH A VISIBLE LUMINESCENCE

Authors
ZACHARIAS M FREISTEDT H STOLZE F DRUSEDAU TP ROSENBAUER M STUTZMANN M
Citation
M. Zacharias et al., PROPERTIES OF SPUTTERED A-SIOX-H ALLOYS WITH A VISIBLE LUMINESCENCE, Journal of non-crystalline solids, 166, 1993, pp. 1089-1092
Citations number
12
Categorie Soggetti
Material Science, Ceramics
Journal title
Journal of non-crystalline solids → ACNP
ISSN journal
00223093
Volume
166
Year of publication
1993
Part
2
Pages
1089 - 1092
Database
ISI
SICI code
0022-3093(1993)166:<1089:POSAAW>2.0.ZU;2-5
Abstract
Thin films of amorphous silicon-oxygen-hydrogen alloys have been prepa red by sputtering of silicon in water vapour. The obtained samples wer e characterized by infrared absorption, Rutherford backscattering, ela stic recoil detection, optical transmission, and luminescence measurem ents. The appearance of a strong, visible (red) luminescence at room t emperature for oxygen contents around 40 - 50 at% is discussed on the basis of microscopic evidence deduced from optically detected magnetic resonance.