A SIMPLE CALIBRATION FOR ROUTINE SECTION THICKNESS MEASUREMENTS USINGCURRENT-DENSITY RATIOS

Citation
Ym. Heng et al., A SIMPLE CALIBRATION FOR ROUTINE SECTION THICKNESS MEASUREMENTS USINGCURRENT-DENSITY RATIOS, Journal of Microscopy, 173, 1994, pp. 79-82
Citations number
14
Categorie Soggetti
Microscopy
Journal title
ISSN journal
00222720
Volume
173
Year of publication
1994
Part
1
Pages
79 - 82
Database
ISI
SICI code
0022-2720(1994)173:<79:ASCFRS>2.0.ZU;2-5
Abstract
A method to calibrate current density ratios for the determination of specimen thickness is presented. This method uses a tilt series from a single noncrystalline specimen to create different thicknesses; these are used to generate data points to establish the relationship betwee n specimen thickness and current density ratio. The actual specimen th ickness at O degrees tilt was determined to an accuracy of 5 nm by a p arallax method. From the calibration curves obtained, we observed that the current density ratio was sensitive to relative thickness changes on the same section of less than 1 nm when a 50-mu m objective apertu re was used.