Ym. Heng et al., A SIMPLE CALIBRATION FOR ROUTINE SECTION THICKNESS MEASUREMENTS USINGCURRENT-DENSITY RATIOS, Journal of Microscopy, 173, 1994, pp. 79-82
A method to calibrate current density ratios for the determination of
specimen thickness is presented. This method uses a tilt series from a
single noncrystalline specimen to create different thicknesses; these
are used to generate data points to establish the relationship betwee
n specimen thickness and current density ratio. The actual specimen th
ickness at O degrees tilt was determined to an accuracy of 5 nm by a p
arallax method. From the calibration curves obtained, we observed that
the current density ratio was sensitive to relative thickness changes
on the same section of less than 1 nm when a 50-mu m objective apertu
re was used.