STRUCTURE AND PROPERTIES OF AMORPHOUS DIAMOND-LIKE CARBON-FILMS PRODUCED BY ION-BEAM-ASSISTED PLASMA DEPOSITION

Authors
CHEN J CONRAD JR DODD RA
Citation
J. Chen et al., STRUCTURE AND PROPERTIES OF AMORPHOUS DIAMOND-LIKE CARBON-FILMS PRODUCED BY ION-BEAM-ASSISTED PLASMA DEPOSITION, Journal of materials engineering and performance, 2(6), 1993, pp. 839-842
Citations number
26
Categorie Soggetti
Material Science
Journal title
Journal of materials engineering and performance → ACNP
ISSN journal
10599495
Volume
2
Issue
6
Year of publication
1993
Pages
839 - 842
Database
ISI
SICI code
1059-9495(1993)2:6<839:SAPOAD>2.0.ZU;2-B
Abstract
The microstructure and tribological properties of carbon film produced by ion beam assisted plasma deposition in a plasma source ion implant ation (PSII) chamber with energies varied from 0 to 30 keV are examine d. The process is illustrated schematically, and Raman spectra as well as TEM images and corresponding diffraction patterns of carbon films are shown.