INTERFACE OF THE CU-W MULTILAYERS

The interface of the Cu-W system is investigated using small and large -angle X-ray diffraction (SAXRD, LAXRD) and high resolution transmissi on electron microscopy (HRTEM). Analysis of the spectra is performed u sing the 'statistical' model of the superlattice structure. The Cu-W s uperlattices reveal sharp interface with a rms roughness less than 2 M L (monolayers). Cross-sections of the Cu-W multilayers are analysed by HRTEM in a JEM 3010. Micrographs show a misorientation between copper and tungsten monolayers of about 5 degrees. In other micrographs cont inuity of plans crossing the Cu-W interface with the same misorientati on is found.