RESIDUAL COMPRESSION IN NI FILM PREPARED BY LASER-ABLATION

Large residual compression with the value of (3 similar to 4)10(9) N/m (2) has been observed in Ni films prepared by the laser ablation metho d using a YAG laser. The origin of compression has been discussed base d on the results of X-ray diffraction, streak image of ablated particl es and spectrum of the plume. These experiments showed that excited Ni atoms combined with nitrogen remaining in the vacuum chamber and form ed nitride (Ni3N) which caused compression in the film.