STUDY OF THE CRYSTALLIZATION IN MOLYBDENUM DISILICIDE FILMS

Citation
Ee. Kachurina et al., STUDY OF THE CRYSTALLIZATION IN MOLYBDENUM DISILICIDE FILMS, Russian metallurgy. Metally, (3), 1993, pp. 199-204
Citations number
5
Categorie Soggetti
Metallurgy & Mining
Journal title
ISSN journal
00360295
Issue
3
Year of publication
1993
Pages
199 - 204
Database
ISI
SICI code
0036-0295(1993):3<199:SOTCIM>2.0.ZU;2-8
Abstract
The crystallization of amorphous films of MoSi2 is affected not only b y the conditions of depositing and annealing but also by the crystallo graphical parameters of the film-substrate interface.