4-CHANNEL RECEIVER OPTOELECTRONIC INTEGRATED-CIRCUIT ARRAYS FOR OPTICAL INTERCONNECTIONS

Ultrahigh speed and low crosstalk four-channel receiver optoelectronic integrated circuit (OEIC) arrays comprising GaInAs pin PDs and A1InAs /GaInAs HEMTs have been successfully fabricated on an InP substrate. T hese arrays were designed to have good crosstalk characteristics which are the most critical issue in array devices. The resistive-load OEIC arrays exhibited high speed operation up to 5 Gb/s and low crosstalk of less than -38 dB between whole adjacent channels over entire freque ncy range below 4.0 GHz. The average sensitivity of resistive-load OEI C arrays was -18.5 dBm at 3 Gb/s for a bit-error-rate of 1O(-9) over f our channels. Good uniformity of device characteristics was obtained o ver 2-inch InP wafer. These results suggest that receiver OEIC arrays are quite promising fdr the application to high-speed multi-channel op tical interconnections.