DRY ETCH PROCESSES AND SENSORS

BARNA GG LOEWENSTEIN LM HENCK SA CHAPADOS P BRANKNER KJ GALE RJ MOZUMDER PK BUTLER SW STEFANI JA

Gg. Barna et al., DRY ETCH PROCESSES AND SENSORS, Solid state technology, 37(1), 1994, pp. 47

11

Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter

Solid state technology → ACNP

0038111X

37

1

1994

ISI

0038-111X(1994)37:1<47:DEPAS>2.0.ZU;2-G