MMST WAFER CLEANING

Authors
BOWLING RA OBRIEN SC LOEWENSTEIN LM BENNETT MH BOHANNON BK
Citation
Ra. Bowling et al., MMST WAFER CLEANING, Solid state technology, 37(1), 1994, pp. 61
Citations number
6
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid state technology → ACNP
ISSN journal
0038111X
Volume
37
Issue
1
Year of publication
1994
Database
ISI
SICI code
0038-111X(1994)37:1<61:MWC>2.0.ZU;2-9
Abstract
The wafer cleaning goal of the Tl-ARPA-Air Force MMST program