CALIBRATION OF AN EXCIMER LASER-PLASMA SOURCE FOR X-RAY-LITHOGRAPHY

Authors
TURCU ICE MALDONADO JR ROSS IN SHIELD H TRENDA P BATANI D FLUCK P GOODSON H
Citation
Ice. Turcu et al., CALIBRATION OF AN EXCIMER LASER-PLASMA SOURCE FOR X-RAY-LITHOGRAPHY, Microelectronic engineering, 23(1-4), 1994, pp. 207-210
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
23
Issue
1-4
Year of publication
1994
Pages
207 - 210
Database
ISI
SICI code
0167-9317(1994)23:1-4<207:COAELS>2.0.ZU;2-I
Abstract
Several absolute X-ray flux calibration techniques were used on the ex cimer laser-plasma source operating with 7ps pulse trains. Good agreem ent was obtained for the source operated at similar to 100mW X-ray ave rage power and similar to 1nm wavelength. Based on this data, scaling laws are given for a lithographic tool printing four 200mm diameter wa fers per hour.