SPEED AND EFFICIENCY IN MULTIPLE P-I-N PHOTODETECTORS

We present a theoretical evaluation of the application of multiple int rinsic layers to enhancing the quantum efficiency of high-speed p-i-n photodetectors. It is shown that the use of multiple layers may lead t o substantial improvements in the efficiency of detectors operating in the 20-100-GHz range, provided that the device area is reduced to lim it the intrinsic capacitance and special care is taken to avoid large parasitic effects. Potential fabrication schemes are discussed.