MICRO GAS-FLOW SENSOR WITH INTEGRATED HEAT SINK AND FLOW GUIDE

Authors
QIU L HEIN S OBERMEIER E SCHUBERT A
Citation
L. Qiu et al., MICRO GAS-FLOW SENSOR WITH INTEGRATED HEAT SINK AND FLOW GUIDE, Sensors and actuators. A, Physical, 54(1-3), 1996, pp. 547-551
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
54
Issue
1-3
Year of publication
1996
Pages
547 - 551
Database
ISI
SICI code
0924-4247(1996)54:1-3<547:MGSWIH>2.0.ZU;2-#
Abstract
A microsensor for gas-flow sensing applications with high sensitivity (700 mV at a flow velocity of 2.7 m s(-1) and a supply voltage of 3 V) , low power consumption (8 mW at 55 K over-temperature and an airflow velocity of 0.8 m s(-1)) and short response time is presented. A heat sink and Bow guide integrated on the backside of the microsensor is us ed to modulate the temperature distribution on the diaphragm to achiev e an extended measurement range. Results from device simulation, techn ological processing and sensor performance are discussed.