ANALYSIS OF A HIGHLY SENSITIVE SILICON GYROSCOPE WITH CANTILEVER BEAMAS VIBRATING MASS

In this paper we investigate the behaviour of a silicon-based angular rate sensor which uses a cantilever beam for the vibrating mass, To th is end, we examine how the mechanical quality factor influences both t he sensitivity and stability of the sensor in the absence of any feedb ack control. By way of analysis, a simple physical model if presented that describes both the relationship between the tuned device and its sensitivity and, also, how the stability of the device is affected by the various modes of the beam's vibration.