POLYTYPE TRANSFORMATIONS IN SIC-EPITAXIAL LAYERS - THE COLOR CATHODOLUMINESCENCE-SEM STUDIES

Authors
SAPARIN GV OBYDEN SK MOKHOV EN ROENKOV AD AHMEDOV BA
Citation
Gv. Saparin et al., POLYTYPE TRANSFORMATIONS IN SIC-EPITAXIAL LAYERS - THE COLOR CATHODOLUMINESCENCE-SEM STUDIES, Scanning, 16(1), 1994, pp. 21-25
Citations number
11
Categorie Soggetti
Microscopy
Journal title
Scanning → ACNP
ISSN journal
01610457
Volume
16
Issue
1
Year of publication
1994
Pages
21 - 25
Database
ISI
SICI code
0161-0457(1994)16:1<21:PTISL->2.0.ZU;2-Y
Abstract
The polytype transformation in SiC-epitaxial layers grown by the subli mation ''sandwich method'' have been studied by means of a real color SEM cathodoluminescence (CL) technique. The variation of polytypes gro wn on 6H-, 4H-, 15R-, and 21R-polytype substrates is demonstrated. Dif ferent spectral composition of local CL emission is observed on smooth and profiled substrate surfaces. The double polytype transformation e ffect was fixed. The nature of the polytype transformation in SiC epit axial layers is discussed.