Sd. Peacor et T. Hibma, REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION STUDY OF THE GROWTH OF NIO AND COO THIN-FILMS BY MOLECULAR-BEAM EPITAXY, Surface science, 301(1-3), 1994, pp. 11-18
NiO thin films have been prepared under UHV conditions by metal evapor
ation on both ex-situ and in-situ cleaved MgO(100) using O-2 and NO2 a
s oxidants. Changes in the film morphology are monitored with reflecti
on high-energy electron diffraction (RHEED). While it is possible to g
row films epitaxially using O-2, we find films grown using NO2 to be o
f superior quality, Using NO2 as an oxidant, films synthesized between
200 and 450 degrees C grow layer by layer, while an increase in surfa
ce disorder is observed in films grown below 200 degrees C. Pronounced
RHEED intensity oscillations are observed for 200<T<450 degrees C, al
lowing for the measurement of film thickness. We also observe RHEED in
tensity oscillations at room temperature when NiO thin films grown at
high temperatures are used as a substrate. The general form of the osc
illations and associated changes in the RHEED pattern (and thus surfac
e morphology) are markedly different at this low temperature We also r
eport results of CoO epitaxial growth on MgO(100) using NO2 as an oxid
ant.