Recent surface crystallographic studies involving impact collision ion
scattering spectroscopy (ICISS) have utilized beams of Nef ions as th
e probe and an electrostatic analyzer as the detector. The data were a
nalyzed under the assumption that the path dependent neutralization co
uld be neglected for scattered Ne+ ions of at least 4 keV incident kin
etic energy. We have investigated this assumption by collecting energy
and angle dispersive ICISS distributions with a time-of-flight analyz
er while separating the ion and neutral yields by application of a pot
ential to the free flight region. This investigation shows that both 5
and 10 keV Ne+ scattered from Ag(001) display considerable path-depen
dent neutralization, but that of Na+ is very small.