SNAPPING MICROSWITCHES WITH ADJUSTABLE ACCELERATION THRESHOLD

This paper presents the design, fabrication and testing of prestressed bimorph microbeams for applications to tunable acceleration switches. The prestressed bimorph beams are buckled due to the residual stress difference between two dissimilar films, thereby generating initial be am deflections upon fabrication. Necessary and sufficient conditions f or snapping action of the deflected bimorph beam have been derived fro m snap-through buckling analysis. A set of SiO2/p(+)-silicon bimorph b eams has been designed and fabricated in three different lengths, 800, 900 and 1000 mu m. The electrostatic snap-through voltage for each mi crobeam has been measured as 32, 56.3 and 76.5 V, respectively. Microm echanical properties of beam materials have been measured from on-chip test structures. It is demonstrated that the three different microswi tches with a 7 mu g proof-mass can be applicable to acceleration switc hes, where threshold acceleration levels can be adjustable within the ranges 0-14, 0-35 and 0-47 g, respectively, under inter-electrode bias voltages of 0-76 V.