We have demonstrated intersubband transition energies as high as 580 m
eV (2.1 mu m wavelength) in InGaAs/AlGaAs quantum wells (QWs) grown on
GaAs substrates. The well width dependence of intersubband transition
energies in both In0.5Ga0.5As/Al0.45Ga0.55As QWs and In0.5Ga0.5As/AlA
s QWs have been determined. Good agreement of the intersubband transit
ion energies to a single band effective mass model with band nonparabo
licity included is found. Experimental studies of buffer and QW growth
parameters for optimized intersubband absorption have also been perfo
rmed.