PRECURSOR PROPERTIES OF CALCIUM BETA-DIKETONATE IN VAPOR-PHASE ATOMICLAYER EPITAXY

Authors
AARIK J AIDLA A JAEK A LESKELA M NIINISTO L
Citation
J. Aarik et al., PRECURSOR PROPERTIES OF CALCIUM BETA-DIKETONATE IN VAPOR-PHASE ATOMICLAYER EPITAXY, Applied surface science, 75, 1994, pp. 33-38
Citations number
13
Categorie Soggetti
Physics, Condensed Matter","Chemistry Physical","Materials Science, Coatings & Films
Journal title
Applied surface science → ACNP
ISSN journal
01694332
Volume
75
Year of publication
1994
Pages
33 - 38
Database
ISI
SICI code
0169-4332(1994)75:<33:PPOCBI>2.0.ZU;2-M
Abstract
Real time mass monitoring was employed to investigate the atomic layer epitaxy process using Ca(thd)(2)/H2O (thd = 2,2,6,6-tetramethyl-3,5-h eptanedione) and Ca(thd)(2)/H2S as precursors. The decomposition of Ca (thd)(2) on the substrate surface had a significant effect on the grow th process while the fractionation of the precursor in the evaporation cell did not affect the growth rate at source temperatures below 280 degrees C. The activation energy of the Ca(thd)(2) decomposition proce ss was determined from the deposit mass measurements, being 30 kJ/mol.